Impact of etching conditions on the sidewall quality of InGaN/GaN micro-LEDs investigated by cathodoluminescence imaging

authored by

Stefan Wolter, Vladislav Agluschewitsch, Silke Wolter, Frederik Lüßmann, Christoph Margenfeld, Georg Schöttler, Jana Hartmann, Andreas Waag

Type

Article

Journal

Journal of applied physics

Volume

136

ISSN

0021-8979

Publication date

28.12.2024

Publication status

Published

Peer reviewed

Yes

Electronic version(s)

https://doi.org/10.1063/5.0243841 (Access: Unknown)
https://pubs.aip.org/jap/article/136/24/245703/3328166/Impact-of-etching-conditions-on-the-sidewall (Access: Unknown)