Nonevaporable getter-MEMS for generating UHV conditions in small volumina

verfasst von: Leonard Frank Diekmann, Alexander Kassner, Folke Dencker, Marc Christopher Wurz
Abstract: The industrial use of quantum sensors requires further miniaturization of the experimental peripherals, i.e., the high vacuum chamber, laser technology, and control electronics. A central part of the high vacuum chamber is the maintenance of vacuum conditions. For this purpose, a prototype of a compact, i.e., miniaturized, ultrahigh vacuum pump in the form of a nonevaporable getter (NEG) pump at a wafer level (MEMS), is developed within the scope of this work. With regard to the basic conditions of the functionality of the NEG, a miniaturized heating plate with temperature sensors is analytically and numerically developed, constructed, and characterized in an ultrahigh vacuum test stand. This is followed by the integration of the NEG into the existing system, which, in connection with the characterization of material-specific parameters, enables a first correlation of heat input and pumping power. Thus, performance data of the getter-MEMS under high-vacuum confinement confirm its usability for quantum sensors. In addition, optimization potentials are shown with regard to all partial aspects of the MEMS.
Organisationseinheit(en): Institut für Mikroproduktionstechnik
QuantumFrontiers
Typ: Artikel
Journal: Journal of Vacuum Science and Technology B
Band: 40
ISSN: 2166-2746
Publikationsdatum: 09.2022
Publikationsstatus: Veröffentlicht
Peer-reviewed: Ja
ASJC Scopus Sachgebiete: Elektronische, optische und magnetische Materialien, Instrumentierung, Prozesschemie und -technologie, Oberflächen, Beschichtungen und Folien, Elektrotechnik und Elektronik, Werkstoffchemie
Elektronische Version(en): https://doi.org/10.1116/6.0001991 (Zugang: Offen)

BibTeX

@article{229a5673e8aa431982cd7d01e1a903bc,
title = "Nonevaporable getter-MEMS for generating UHV conditions in small volumina",
abstract = "The industrial use of quantum sensors requires further miniaturization of the experimental peripherals, i.e., the high vacuum chamber, laser technology, and control electronics. A central part of the high vacuum chamber is the maintenance of vacuum conditions. For this purpose, a prototype of a compact, i.e., miniaturized, ultrahigh vacuum pump in the form of a nonevaporable getter (NEG) pump at a wafer level (MEMS), is developed within the scope of this work. With regard to the basic conditions of the functionality of the NEG, a miniaturized heating plate with temperature sensors is analytically and numerically developed, constructed, and characterized in an ultrahigh vacuum test stand. This is followed by the integration of the NEG into the existing system, which, in connection with the characterization of material-specific parameters, enables a first correlation of heat input and pumping power. Thus, performance data of the getter-MEMS under high-vacuum confinement confirm its usability for quantum sensors. In addition, optimization potentials are shown with regard to all partial aspects of the MEMS.",
author = "Diekmann, {Leonard Frank} and Alexander Kassner and Folke Dencker and Wurz, {Marc Christopher}",
note = "Funding Information: This work was funded by the Deutsche Forschung sgemeinschaft (DFG, German Research Foundation) under Germany{\textquoteright}s Excellence Strategy—EXC-2123 QuantumFrontiers— 390837967. Furthermore, we would like to thank Hiden Analytical and Pfeiffer Vacuum for disclosing the functionality and calibration of the measurement peripherals used.",
year = "2022",
month = sep,
doi = "10.1116/6.0001991",
language = "English",
volume = "40",
journal = "Journal of Vacuum Science and Technology B",
issn = "2166-2746",
publisher = "AVS Science and Technology Society",
number = "5",
}