Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers

authored by: Thomas Siefke, Carol B.Rojas Hurtado, Johannes Dickmann, Walter Dickmann, Tim Käseberg, Jan Meyer, Sven Burger, Uwe Zeitner, Bernd Bodermann, Stefanie Kroker
Abstract: We demonstrate the retrieval of deep subwavelength structural information in nanooptical polarizers by scatterometry of quasi-bound states in the continuum (quasi-BICs). To this end, we investigate titanium dioxide wire grid polarizers for application wavelengths in the deep ultraviolet (DUV) spectral range fabricated with a self-aligned double-patterning process. In contrast to the time-consuming and elaborate measurement techniques like scanning electron microscopy, asymmetry induced quasi-BICs occurring in the near ultraviolet and visible spectral range provide an easily accessible and efficient probe mechanism. Thereby, dimensional parameters are retrieved with uncertainties in the sub-nanometer range. Our results show that BICs are a promising tool for process control in optics and semiconductor technology.
External Organisation(s): National Metrology Institute of Germany (PTB)
Friedrich Schiller University Jena
Technische Universität Braunschweig
Zuse Institute Berlin (ZIB)
Fraunhofer Institute for Applied Optics and Precision Engineering (IOF)
Type: Article
Journal: Optics express
Volume: 28
Pages: 23122-23132
No. of pages: 11
ISSN: 1094-4087
Publication date: 03.08.2020
Publication status: Published
Peer reviewed: Yes
ASJC Scopus subject areas: Atomic and Molecular Physics, and Optics
Electronic version(s): https://doi.org/10.1364/OE.396044 (Access: Open)

BibTeX

@article{dae4c04d6f524db6b0c4429c6554e642,
title = "Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers",
abstract = "We demonstrate the retrieval of deep subwavelength structural information in nanooptical polarizers by scatterometry of quasi-bound states in the continuum (quasi-BICs). To this end, we investigate titanium dioxide wire grid polarizers for application wavelengths in the deep ultraviolet (DUV) spectral range fabricated with a self-aligned double-patterning process. In contrast to the time-consuming and elaborate measurement techniques like scanning electron microscopy, asymmetry induced quasi-BICs occurring in the near ultraviolet and visible spectral range provide an easily accessible and efficient probe mechanism. Thereby, dimensional parameters are retrieved with uncertainties in the sub-nanometer range. Our results show that BICs are a promising tool for process control in optics and semiconductor technology. ",
author = "Thomas Siefke and Hurtado, {Carol B.Rojas} and Johannes Dickmann and Walter Dickmann and Tim K{\"a}seberg and Jan Meyer and Sven Burger and Uwe Zeitner and Bernd Bodermann and Stefanie Kroker",
year = "2020",
month = aug,
day = "3",
doi = "10.1364/OE.396044",
language = "English",
volume = "28",
pages = "23122--23132",
journal = "Optics express",
issn = "1094-4087",
publisher = "OSA - The Optical Society",
number = "16",
}